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E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Revision:SEMI E152-0709 - Superseded SEMI E144 — Specification for

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Description

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment

and wafer size transition

5 µmまたはそれ以下(0

originally published in 1992

and other methods of measuring electrostatic parameters

E15200 - SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Revision:SEMI E152-0709 - Superseded SEMI E144 — Specification forglobal Physical Interfaces & Carriers Committee2009513global Audits and Reviews Subcommittee20096www. semi. org20097CD ROM 6150 mmEUVLEUVEUVEUVEUVL Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E57 Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers SEMI E100 Specification for a

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